Beam parameters optimization of MEMS piezoresistive accelerometer by using response surface method

This article presents the optimization of a MEMS-based piezoresistive accelerometer sensor using design of experiment (DOE) approach. Two structures of accelerometers, which consist of a proof mass suspended by eight beams, have been investigated. Response surface method (RSM) was employed to op...

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Bibliographic Details

Main Authors:	Norliana, Yusof, Badariah, Bais, Norhayati, Soin, Burhanuddin Yeop, Majlis
Format:	Conference or Workshop Item
Language:	en en en
Published:	2021
Subjects:	T Technology (General) TT Handicrafts Arts and crafts
Online Access:	http://eprints.unisza.edu.my/4264/1/FH03-FRIT-21-55630.pdf http://eprints.unisza.edu.my/4264/2/FH03-FRIT-21-55631.pdf http://eprints.unisza.edu.my/4264/3/FH03-FRIT-21-56579.pdf http://eprints.unisza.edu.my/4264/
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