Fabrication of planar microcoils for LC-MEMS pressure sensor

This paper addresses the design and fabrication of a small scale planar microcoil for LC-MEMS pressure sensor application. A simple process flow based on MEMS fabrication is presented and the key aspects of the processing are discussed. The fabricated microcoils were characterized both morphological...

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Bibliographic Details

Main Authors:	Norliana, Yusof, Badariah, Bais, Norhayati, Soin, Muhamad Ramdzan, Buyong, Burhanuddin, Yeop
Format:	Conference or Workshop Item
Language:	en en
Published:	2020
Subjects:	T Technology (General) TK Electrical engineering. Electronics Nuclear engineering
Online Access:	http://eprints.unisza.edu.my/1826/1/FH03-FRIT-20-42025.pdf http://eprints.unisza.edu.my/1826/2/FH03-FRIT-20-42026.pdf http://eprints.unisza.edu.my/1826/
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