Si-quantum Dots (QD) and SiO2 tunnel barriers

Oxidation of Si for nanostructures on silicon-on-insulator (SOI) substrates is a key process in the fabrication of Si single electron transistor (SET). The most di cult aspect of the fabrication process is the formation of a nanometerscale island sandwiched between two small capacitors having a...

Full description

Bibliographic Details

Main Authors:	Sutikno, Madnasri, Uda, Hashim, Prof. Dr., Zul Azhar, Zahid Jamal, Prof. Dr.
Other Authors:	smadnasri@yahoo.com
Format:	Article
Language:	en
Published:	Universiti Malaysia Perlis (UniMAP) 2010
Subjects:	Explore > Penerbitan universiti UniMAP > Publications UniMAP > Research and development SiO2 tunnel barriers Silicon-on-insulator (SOI) Si-quantum Dots (QD)
Online Access:	http://dspace.unimap.edu.my/123456789/9934
Tags:	Add Tag No Tags, Be the first to tag this record!