Si-quantum Dots (QD) and SiO2 tunnel barriers

Oxidation of Si for nanostructures on silicon-on-insulator (SOI) substrates is a key process in the fabrication of Si single electron transistor (SET). The most di cult aspect of the fabrication process is the formation of a nanometerscale island sandwiched between two small capacitors having a...

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Main Authors: Sutikno, Madnasri, Uda, Hashim, Prof. Dr., Zul Azhar, Zahid Jamal, Prof. Dr.
Other Authors: smadnasri@yahoo.com
Format: Article
Language:en
Published: Universiti Malaysia Perlis (UniMAP) 2010
Subjects:
Online Access:http://dspace.unimap.edu.my/123456789/9934
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_version_ 1831783107827597312
author Sutikno, Madnasri
Uda, Hashim, Prof. Dr.
Zul Azhar, Zahid Jamal, Prof. Dr.
author2 smadnasri@yahoo.com
author_facet smadnasri@yahoo.com
Sutikno, Madnasri
Uda, Hashim, Prof. Dr.
Zul Azhar, Zahid Jamal, Prof. Dr.
author_sort Sutikno, Madnasri
building UniMAP Library
collection Institutional Repository
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
continent Asia
country Malaysia
description Oxidation of Si for nanostructures on silicon-on-insulator (SOI) substrates is a key process in the fabrication of Si single electron transistor (SET). The most di cult aspect of the fabrication process is the formation of a nanometerscale island sandwiched between two small capacitors having a very thin insulator to allow electrons to pass through in a stochastic process, known as PADOX. This oxidation creates an island sandwiched between two tunnel barriers which constitutes a SET. The constriction of Si causes automatic tunnel barrier formation between source–QD and drain-QD. The unique characteristics of PADOX arises from i) the suppression of oxidation by mechanical stress, and ii) the oxidation from below.
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institution Universiti Malaysia Perlis
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publisher Universiti Malaysia Perlis (UniMAP)
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spelling my.unimap-99342010-10-20T09:25:50Z Si-quantum Dots (QD) and SiO2 tunnel barriers Sutikno, Madnasri Uda, Hashim, Prof. Dr. Zul Azhar, Zahid Jamal, Prof. Dr. smadnasri@yahoo.com Explore -- Penerbitan universiti UniMAP -- Publications UniMAP -- Research and development SiO2 tunnel barriers Silicon-on-insulator (SOI) Si-quantum Dots (QD) Oxidation of Si for nanostructures on silicon-on-insulator (SOI) substrates is a key process in the fabrication of Si single electron transistor (SET). The most di cult aspect of the fabrication process is the formation of a nanometerscale island sandwiched between two small capacitors having a very thin insulator to allow electrons to pass through in a stochastic process, known as PADOX. This oxidation creates an island sandwiched between two tunnel barriers which constitutes a SET. The constriction of Si causes automatic tunnel barrier formation between source–QD and drain-QD. The unique characteristics of PADOX arises from i) the suppression of oxidation by mechanical stress, and ii) the oxidation from below. 2010-10-20T09:25:50Z 2010-10-20T09:25:50Z 2008-07 Article p.8-9 1823-9633 http://dspace.unimap.edu.my/123456789/9934 en Explore July 2008 Universiti Malaysia Perlis (UniMAP) Pejabat Timbalan Naib Canselor (Penyelidikan dan Inovasi)
spellingShingle Explore -- Penerbitan universiti
UniMAP -- Publications
UniMAP -- Research and development
SiO2 tunnel barriers
Silicon-on-insulator (SOI)
Si-quantum Dots (QD)
Sutikno, Madnasri
Uda, Hashim, Prof. Dr.
Zul Azhar, Zahid Jamal, Prof. Dr.
Si-quantum Dots (QD) and SiO2 tunnel barriers
title Si-quantum Dots (QD) and SiO2 tunnel barriers
title_full Si-quantum Dots (QD) and SiO2 tunnel barriers
title_fullStr Si-quantum Dots (QD) and SiO2 tunnel barriers
title_full_unstemmed Si-quantum Dots (QD) and SiO2 tunnel barriers
title_short Si-quantum Dots (QD) and SiO2 tunnel barriers
title_sort si-quantum dots (qd) and sio2 tunnel barriers
topic Explore -- Penerbitan universiti
UniMAP -- Publications
UniMAP -- Research and development
SiO2 tunnel barriers
Silicon-on-insulator (SOI)
Si-quantum Dots (QD)
url http://dspace.unimap.edu.my/123456789/9934
url_provider http://dspace.unimap.edu.my/