APA (7th ed.) Citation

Noor, N. H. M., Uda, H., Muhamad Emi Azry, S., & Nuri, A. M. M. (2010). A silicon-oxide-silicon vertically separated electrode nanogap device structure. American Institute of Physics.

Chicago Style (17th ed.) Citation

Noor, N. H. M., Hashim Uda, Shohini Muhamad Emi Azry, and A. M. M. Nuri. A Silicon-oxide-silicon Vertically Separated Electrode Nanogap Device Structure. American Institute of Physics, 2010.

MLA (9th ed.) Citation

Noor, N. H. M., et al. A Silicon-oxide-silicon Vertically Separated Electrode Nanogap Device Structure. American Institute of Physics, 2010.

Warning: These citations may not always be 100% accurate.