APA (7th ed.) Citation

Khalid, N., Shah, K., Singh, J., Le, H. P., Devlin, J., & Zaliman, S. (2010). A very high Q-factor inductor using MEMS technology. SPIE.

Chicago Style (17th ed.) Citation

Khalid, N., K. Shah, J. Singh, H. P. Le, J. Devlin, and Sauli Zaliman. A Very High Q-factor Inductor Using MEMS Technology. SPIE, 2010.

MLA (9th ed.) Citation

Khalid, N., et al. A Very High Q-factor Inductor Using MEMS Technology. SPIE, 2010.