APA (7th ed.) Citation

Normah, A., Uda, H., Mohd Jeffery, M., & Kader Ibrahim, A. W. (2009). Effect of alignment mark architecture on alignment signal behavior in advanced lithography. Universiti Malaya.

Chicago Style (17th ed.) Citation

Normah, Ahmad, Hashim Uda, Manaf Mohd Jeffery, and Abdul Wahab Kader Ibrahim. Effect of Alignment Mark Architecture on Alignment Signal Behavior in Advanced Lithography. Universiti Malaya, 2009.

MLA (9th ed.) Citation

Normah, Ahmad, et al. Effect of Alignment Mark Architecture on Alignment Signal Behavior in Advanced Lithography. Universiti Malaya, 2009.