APA (7th ed.) Citation

Normah, A., Uda, H., Mohd Jefrey, M., & Kader, I. (2009). Characterization of robust alignment mark to improve alignment performance. Institute of Electrical and Electronics Engineering (IEEE).

Chicago Style (17th ed.) Citation

Normah, Ahmad, Hashim Uda, Manaf Mohd Jefrey, and Ibrahim Kader. Characterization of Robust Alignment Mark to Improve Alignment Performance. Institute of Electrical and Electronics Engineering (IEEE), 2009.

MLA (9th ed.) Citation

Normah, Ahmad, et al. Characterization of Robust Alignment Mark to Improve Alignment Performance. Institute of Electrical and Electronics Engineering (IEEE), 2009.