Fabrication of Amorphous silicon Microgap Structure for Energy Saving Devices
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| Language: | en |
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Universiti Kebangsaan Malaysia
2013
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| Online Access: | http://dspace.unimap.edu.my/123456789/25607 |
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| author | Thikra, S. Dhahi Uda, Hashim Md. Eaqub, Ali Nazwa, Taib |
| author2 | uda@unimap.edu.my |
| author_facet | uda@unimap.edu.my Thikra, S. Dhahi Uda, Hashim Md. Eaqub, Ali Nazwa, Taib |
| author_sort | Thikra, S. Dhahi |
| building | UniMAP Library |
| collection | Institutional Repository |
| content_provider | Universiti Malaysia Perlis |
| content_source | UniMAP Library Digital Repository |
| continent | Asia |
| country | Malaysia |
| description | Link to publisher's homepage at http://www.ukm.my/jsm/index.html |
| format | Article |
| id | my.unimap-25607 |
| institution | Universiti Malaysia Perlis |
| language | en |
| publishDate | 2013 |
| publisher | Universiti Kebangsaan Malaysia |
| record_format | dspace |
| spelling | my.unimap-256072013-06-03T07:42:06Z Fabrication of Amorphous silicon Microgap Structure for Energy Saving Devices Fabrikasi Struktur Mikrogap Silikon Amorfus untuk Peranti Jimat Tenaga Thikra, S. Dhahi Uda, Hashim Md. Eaqub, Ali Nazwa, Taib uda@unimap.edu.my Dielectric detection of biomolecule Microgap electrodes Power saving devices Microgaps Link to publisher's homepage at http://www.ukm.my/jsm/index.html We report here the fabrication of microgaps electrodes on amorphous silicon using low cost techniques such as vacuum deposition and conventional lithography. Amorphous silicon is a low cost material and has desirable properties for semiconductor applications. Microgap electrodes have important applications in power saving devices, electrochemical sensors and dielectric detections of biomolecules. Physical characterization by scanning electron microscopy (SEM) demonstrated such microgap electrodes could be produced with high reproducibility and precision. Preliminary electrical characterizations showed such structures are able to maintain a good capacitance parameters and constant current supply over a wide ranging differences in voltages. They have also good efficiency of power consumption with high insulation properties 2013-06-03T07:42:06Z 2013-06-03T07:42:06Z 2011-11-18 Article Sains Malaysiana, vol. 41(6), 2012, pages 755–759. 0126-6039 http://www.ukm.my/jsm/english_journals/vol41num6_2012/vol41num6_2012pg755-759.html http://dspace.unimap.edu.my/123456789/25607 en Universiti Kebangsaan Malaysia |
| spellingShingle | Dielectric detection of biomolecule Microgap electrodes Power saving devices Microgaps Thikra, S. Dhahi Uda, Hashim Md. Eaqub, Ali Nazwa, Taib Fabrication of Amorphous silicon Microgap Structure for Energy Saving Devices |
| title | Fabrication of Amorphous silicon Microgap Structure for Energy Saving Devices |
| title_full | Fabrication of Amorphous silicon Microgap Structure for Energy Saving Devices |
| title_fullStr | Fabrication of Amorphous silicon Microgap Structure for Energy Saving Devices |
| title_full_unstemmed | Fabrication of Amorphous silicon Microgap Structure for Energy Saving Devices |
| title_short | Fabrication of Amorphous silicon Microgap Structure for Energy Saving Devices |
| title_sort | fabrication of amorphous silicon microgap structure for energy saving devices |
| topic | Dielectric detection of biomolecule Microgap electrodes Power saving devices Microgaps |
| url | http://dspace.unimap.edu.my/123456789/25607 |
| url_provider | http://dspace.unimap.edu.my/ |