Vertical electrostatic comb drive actuator for MEMS design
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| Format: | Learning Object |
| Language: | en |
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Universiti Malaysia Perlis
2008
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| Online Access: | http://dspace.unimap.edu.my/123456789/2004 |
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| _version_ | 1831781334209527808 |
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| author | Wan Mokhdzani Wan Nor Haimi |
| author2 | Hafiz Ismail (Advisor) |
| author_facet | Hafiz Ismail (Advisor) Wan Mokhdzani Wan Nor Haimi |
| author_sort | Wan Mokhdzani Wan Nor Haimi |
| building | UniMAP Library |
| collection | Institutional Repository |
| content_provider | Universiti Malaysia Perlis |
| content_source | UniMAP Library Digital Repository |
| continent | Asia |
| country | Malaysia |
| description | Access is limited to UniMAP community. |
| format | Learning Object |
| id | my.unimap-2004 |
| institution | Universiti Malaysia Perlis |
| language | en |
| publishDate | 2008 |
| publisher | Universiti Malaysia Perlis |
| record_format | dspace |
| spelling | my.unimap-20042008-09-09T05:02:05Z Vertical electrostatic comb drive actuator for MEMS design Wan Mokhdzani Wan Nor Haimi Hafiz Ismail (Advisor) Microelectromechanical systems -- Design and construction Microelectronics Actuators Comb-drive actuator Microsensor Detectors Access is limited to UniMAP community. This report serves as a summary for project titled Vertical Electrostatic Comb-Drive Actuator. A comb-finger structure is disclosed for use in optical switching applications. Large displacements of movable fingers were in consideration for the optical applications. The comb-finger structure is able to produce actuation force for a certain amount of displacement for the use of deflection. The comb-finger structure moves in a perpendicular direction to the substrate as a function of applied voltages. Actuation force changes for different physical parameters of the comb finger structure. 2008-09-09T05:02:05Z 2008-09-09T05:02:05Z 2008-04 Learning Object http://dspace.unimap.edu.my/123456789/2004 en Universiti Malaysia Perlis School of Microelectronic Engineering |
| spellingShingle | Microelectromechanical systems -- Design and construction Microelectronics Actuators Comb-drive actuator Microsensor Detectors Wan Mokhdzani Wan Nor Haimi Vertical electrostatic comb drive actuator for MEMS design |
| title | Vertical electrostatic comb drive actuator for MEMS design |
| title_full | Vertical electrostatic comb drive actuator for MEMS design |
| title_fullStr | Vertical electrostatic comb drive actuator for MEMS design |
| title_full_unstemmed | Vertical electrostatic comb drive actuator for MEMS design |
| title_short | Vertical electrostatic comb drive actuator for MEMS design |
| title_sort | vertical electrostatic comb drive actuator for mems design |
| topic | Microelectromechanical systems -- Design and construction Microelectronics Actuators Comb-drive actuator Microsensor Detectors |
| url | http://dspace.unimap.edu.my/123456789/2004 |
| url_provider | http://dspace.unimap.edu.my/ |