Mohamed, Z., & (Advisor), N. J. J. (2008). Study of the effect of different Gases parameter in Dry Etching process on Etch Rate profile. Universiti Malaysia Perlis.
Chicago Style (17th ed.) CitationMohamed, Zaharah, and Nur Juliana Juhari (Advisor). Study of the Effect of Different Gases Parameter in Dry Etching Process on Etch Rate Profile. Universiti Malaysia Perlis, 2008.
MLA (9th ed.) CitationMohamed, Zaharah, and Nur Juliana Juhari (Advisor). Study of the Effect of Different Gases Parameter in Dry Etching Process on Etch Rate Profile. Universiti Malaysia Perlis, 2008.
Warning: These citations may not always be 100% accurate.