Fabrication and characterization of 50 nm silicon nano-gap structures

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Bibliographic Details
Main Authors:	T.S, Dhahi, Uda, Hashim, Prof. Dr., N.M., Ahmed
Format:	Article
Language:	en
Published:	American Scientific Publishers 2011
Subjects:	Nano-gap Nanostructure Optical characterization Pattern-size reduction Photolithography
Online Access:	http://dspace.unimap.edu.my/123456789/13290
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