Micro-diaphragm performance analysis for polyimide diaphragm
This paper presents a micro-diaphragm performance analysis for optical sensor for human pulse pressure detection. The effect of diaphragm radius and diaphragm thickness on the static and frequency responses were investigated. It can be concluded that the polyimide micro-diaphragm with a radius of 90...
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| Format: | Conference or Workshop Item |
| Language: | en |
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2010
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| Online Access: | http://eprints.um.edu.my/9302/1/Micro-diaphragm_performance_analysis_for_polyimide_diaphragm.pdf http://eprints.um.edu.my/9302/ http://www.scopus.com/inward/record.url?eid=2-s2.0-77957559410&partnerID=40&md5=01254ad1ac1ece862d371b3ce308834e http://ieeexplore.ieee.org/xpls/absall.jsp?arnumber=5549367 |
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| author | Hasikin, K. Soin, N. Ibrahim, F. |
| author_facet | Hasikin, K. Soin, N. Ibrahim, F. |
| author_sort | Hasikin, K. |
| building | UM Library |
| collection | Institutional Repository |
| content_provider | Universiti Malaya |
| content_source | UM Research Repository |
| continent | Asia |
| country | Malaysia |
| description | This paper presents a micro-diaphragm performance analysis for optical sensor for human pulse pressure detection. The effect of diaphragm radius and diaphragm thickness on the static and frequency responses were investigated. It can be concluded that the polyimide micro-diaphragm with a radius of 90μm and thickness of 4μm has achieved the optimum performance in term of the sensitivity, flexural rigidity and resonance frequency. © 2010 IEEE. |
| format | Conference or Workshop Item |
| id | my.um.eprints-9302 |
| institution | Universiti Malaya |
| language | en |
| publishDate | 2010 |
| record_format | eprints |
| spelling | my.um.eprints-93022017-11-01T04:11:40Z http://eprints.um.edu.my/9302/ Micro-diaphragm performance analysis for polyimide diaphragm Hasikin, K. Soin, N. Ibrahim, F. T Technology (General) TA Engineering (General). Civil engineering (General) This paper presents a micro-diaphragm performance analysis for optical sensor for human pulse pressure detection. The effect of diaphragm radius and diaphragm thickness on the static and frequency responses were investigated. It can be concluded that the polyimide micro-diaphragm with a radius of 90μm and thickness of 4μm has achieved the optimum performance in term of the sensitivity, flexural rigidity and resonance frequency. © 2010 IEEE. 2010 Conference or Workshop Item PeerReviewed application/pdf en http://eprints.um.edu.my/9302/1/Micro-diaphragm_performance_analysis_for_polyimide_diaphragm.pdf Hasikin, K. and Soin, N. and Ibrahim, F. (2010) Micro-diaphragm performance analysis for polyimide diaphragm. In: 2010 IEEE International Conference on Semiconductor Electronics, ICSE 2010, 2010, Melaka . http://www.scopus.com/inward/record.url?eid=2-s2.0-77957559410&partnerID=40&md5=01254ad1ac1ece862d371b3ce308834e http://ieeexplore.ieee.org/xpls/absall.jsp?arnumber=5549367 |
| spellingShingle | T Technology (General) TA Engineering (General). Civil engineering (General) Hasikin, K. Soin, N. Ibrahim, F. Micro-diaphragm performance analysis for polyimide diaphragm |
| title | Micro-diaphragm performance analysis for polyimide diaphragm |
| title_full | Micro-diaphragm performance analysis for polyimide diaphragm |
| title_fullStr | Micro-diaphragm performance analysis for polyimide diaphragm |
| title_full_unstemmed | Micro-diaphragm performance analysis for polyimide diaphragm |
| title_short | Micro-diaphragm performance analysis for polyimide diaphragm |
| title_sort | micro-diaphragm performance analysis for polyimide diaphragm |
| topic | T Technology (General) TA Engineering (General). Civil engineering (General) |
| url | http://eprints.um.edu.my/9302/1/Micro-diaphragm_performance_analysis_for_polyimide_diaphragm.pdf http://eprints.um.edu.my/9302/ http://www.scopus.com/inward/record.url?eid=2-s2.0-77957559410&partnerID=40&md5=01254ad1ac1ece862d371b3ce308834e http://ieeexplore.ieee.org/xpls/absall.jsp?arnumber=5549367 |
| url_provider | http://eprints.um.edu.my/ |