Badaruddin, M., Muhamad, M., & Rahman, S. (2011). Multi-phase structured silicon carbon nitride thin films prepared by hot-wire chemical vapour deposition.
Chicago Style (17th ed.) CitationBadaruddin, M.R, M.R Muhamad, and S.A Rahman. Multi-phase Structured Silicon Carbon Nitride Thin Films Prepared by Hot-wire Chemical Vapour Deposition. 2011.
MLA (9th ed.) CitationBadaruddin, M.R, et al. Multi-phase Structured Silicon Carbon Nitride Thin Films Prepared by Hot-wire Chemical Vapour Deposition. 2011.
Warning: These citations may not always be 100% accurate.