Effects of annealing treatment on optical properties of anatase TiO2 thin films
In this investigation, anatase TiO2 thin films were grown by radio frequency magnetron sputtering on glass substrates at a high sputtering pressure and room temperature. The anatase films were then annealed at 300-600 °C in air for a period of 1 hour. To examine the structure and morphology of the...
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World Academy of Science, Engineering and Technology (WASET)
2008
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| Online Access: | http://eprints.um.edu.my/6864/ https://waset.org/publications/3164/effects-of-annealing-treatment-on-optical-properties-of-anatase-tio2-thin-films |
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| author | Hasan, M.M. Haseeb, A.S. Md. Abdul Saidur, Rahman Masjuki, Haji Hassan |
| author_facet | Hasan, M.M. Haseeb, A.S. Md. Abdul Saidur, Rahman Masjuki, Haji Hassan |
| author_sort | Hasan, M.M. |
| building | UM Library |
| collection | Institutional Repository |
| content_provider | Universiti Malaya |
| content_source | UM Research Repository |
| continent | Asia |
| country | Malaysia |
| description | In this investigation, anatase TiO2 thin films were grown by radio frequency magnetron sputtering on glass substrates at a high sputtering pressure and room temperature. The anatase films were then annealed at 300-600 °C in air for a period of 1 hour. To examine the structure and morphology of the films, X-ray diffraction (XRD) and atomic force microscopy (AFM) methods were used respectively. From X-ray diffraction patterns of the TiO 2 films, it was found that the as-deposited film showed some differences compared with the annealed films and the intensities of the peaks of the crystalline phase increased with the increase of annealing temperature. From AFM images, the distinct variations in the morphology of the thin films were also observed. The optical constants were characterized using the transmission spectra of the films obtained by UV-VIS-IR spectrophotometer. Besides, optical thickness of the film deposited at room temperature was calculated |
| format | Article |
| id | my.um.eprints-6864 |
| institution | Universiti Malaya |
| publishDate | 2008 |
| publisher | World Academy of Science, Engineering and Technology (WASET) |
| record_format | eprints |
| spelling | my.um.eprints-68642019-10-25T06:05:16Z http://eprints.um.edu.my/6864/ Effects of annealing treatment on optical properties of anatase TiO2 thin films Hasan, M.M. Haseeb, A.S. Md. Abdul Saidur, Rahman Masjuki, Haji Hassan TA Engineering (General). Civil engineering (General) TJ Mechanical engineering and machinery In this investigation, anatase TiO2 thin films were grown by radio frequency magnetron sputtering on glass substrates at a high sputtering pressure and room temperature. The anatase films were then annealed at 300-600 °C in air for a period of 1 hour. To examine the structure and morphology of the films, X-ray diffraction (XRD) and atomic force microscopy (AFM) methods were used respectively. From X-ray diffraction patterns of the TiO 2 films, it was found that the as-deposited film showed some differences compared with the annealed films and the intensities of the peaks of the crystalline phase increased with the increase of annealing temperature. From AFM images, the distinct variations in the morphology of the thin films were also observed. The optical constants were characterized using the transmission spectra of the films obtained by UV-VIS-IR spectrophotometer. Besides, optical thickness of the film deposited at room temperature was calculated World Academy of Science, Engineering and Technology (WASET) 2008 Article PeerReviewed Hasan, M.M. and Haseeb, A.S. Md. Abdul and Saidur, Rahman and Masjuki, Haji Hassan (2008) Effects of annealing treatment on optical properties of anatase TiO2 thin films. International Journal of Chemical and Biological Engineering, 1. pp. 1-5. ISSN 2010-3867, https://waset.org/publications/3164/effects-of-annealing-treatment-on-optical-properties-of-anatase-tio2-thin-films |
| spellingShingle | TA Engineering (General). Civil engineering (General) TJ Mechanical engineering and machinery Hasan, M.M. Haseeb, A.S. Md. Abdul Saidur, Rahman Masjuki, Haji Hassan Effects of annealing treatment on optical properties of anatase TiO2 thin films |
| title | Effects of annealing treatment on optical properties of anatase TiO2 thin films |
| title_full | Effects of annealing treatment on optical properties of anatase TiO2 thin films |
| title_fullStr | Effects of annealing treatment on optical properties of anatase TiO2 thin films |
| title_full_unstemmed | Effects of annealing treatment on optical properties of anatase TiO2 thin films |
| title_short | Effects of annealing treatment on optical properties of anatase TiO2 thin films |
| title_sort | effects of annealing treatment on optical properties of anatase tio2 thin films |
| topic | TA Engineering (General). Civil engineering (General) TJ Mechanical engineering and machinery |
| url | http://eprints.um.edu.my/6864/ https://waset.org/publications/3164/effects-of-annealing-treatment-on-optical-properties-of-anatase-tio2-thin-films |
| url_provider | http://eprints.um.edu.my/ |