Structural, optical and morphological properties of TiO2/Ag/TiO2 multilayer films
In this investigation, TiO 2/Ag/TiO 2 multilayer-films were deposited on microscope glass slides with varying individual layer thicknesses by radio-frequency reactive magnetron sputtering. Prior to multilayer development, single layers of Ag and TiO 2 were deposited and characterized. All the films...
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| Main Authors: | , , , , |
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| Format: | Article |
| Published: |
American Institute of Physics
2009
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| Subjects: | |
| Online Access: | http://eprints.um.edu.my/6790/ https://doi.org/10.1063/1.3160137 |
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| Summary: | In this investigation, TiO 2/Ag/TiO 2 multilayer-films were deposited on microscope glass slides with varying individual layer thicknesses by radio-frequency reactive magnetron sputtering. Prior to multilayer development, single layers of Ag and TiO 2 were deposited and characterized. All the films were prepared at a moderately high pressure at room temperature. It was found that single layer of TiO 2 showed anatase polycrystalline structure. It also exhibited high visible transmittance of above 80 and higher refractive index of 2.31 at a wavelength of 550 nm. The indirect optical band gap of the TiO 2 films was estimated as 3.39 eV. The Ag single layer films were found to be crystalline with a very high reflectance for IR (Infra-red) light. Finally, the multilayers have been deposited and characterized by X-ray diffraction, UV-visible-IR spectrophotometry, scanning electron microscopy and profilometry. |
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