Experimental investigations of the effect of the neutral gas pressure on the separate control of ion energy and flux in dual frequency capacitively coupled plasmas

Classical dual-frequency capacitively coupled plasmas (2f CCPs) operating at low pressures and significantly different frequencies are often used for a variety of applications in semiconductor manufacturing in order to control the mean ion energy at the electrodes separately from the ion flux. Howev...

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Bibliographic Details

Main Authors:	Saikia, Partha, Bhuyan, Heman, Yap, Seong Ling, Escalona, Miguel, Favre, Mario, Wyndham, Edmund, Schulze, Julian
Format:	Article
Published:	AIP Publishing 2019
Subjects:	Q Science (General) QC Physics
Online Access:	http://eprints.um.edu.my/23578/ https://doi.org/10.1063/1.5094603
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