Saikia, P., Bhuyan, H., Yap, S. L., Escalona, M., Favre, M., Wyndham, E., & Schulze, J. (2019). Experimental investigations of the effect of the neutral gas pressure on the separate control of ion energy and flux in dual frequency capacitively coupled plasmas. AIP Publishing.
Chicago Style (17th ed.) CitationSaikia, Partha, Heman Bhuyan, Seong Ling Yap, Miguel Escalona, Mario Favre, Edmund Wyndham, and Julian Schulze. Experimental Investigations of the Effect of the Neutral Gas Pressure on the Separate Control of Ion Energy and Flux in Dual Frequency Capacitively Coupled Plasmas. AIP Publishing, 2019.
MLA (9th ed.) CitationSaikia, Partha, et al. Experimental Investigations of the Effect of the Neutral Gas Pressure on the Separate Control of Ion Energy and Flux in Dual Frequency Capacitively Coupled Plasmas. AIP Publishing, 2019.
