Electrical Characteristics of Oxidized/Nitrided Zr Thin Film on Si

In this work, electrical properties of simultaneously oxidized and nitrided sputtered Zr thin film on n-type Si via N2O gas were systematically investigated and charge conduction mechanisms through the oxide were quantitatively analyzed. Effects of simultaneous oxidation and nitridation duration on...

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Bibliographic Details

Main Authors:	Wong, Yew Hoong, Cheong, K.Y.
Format:	Article
Published:	Electrochemical Society 2011
Subjects:	TA Engineering (General). Civil engineering (General)
Online Access:	http://eprints.um.edu.my/12997/ http://jes.ecsdl.org/content/158/12/H1270.abstract http://dx.doi.org/10.1149/2.106112jes
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