Generation of RFIC electrode patterns using electron beam lithography and wet etching characteristic of PZT thin film / Suriati Muhamad
This thesis report on fabrication technique of electride pattern using e-beam lithography and wet etching procss on lead zirconate titanate thin film. The patterns were created using Raith software,
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| Main Author: | |
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| Format: | Thesis |
| Language: | en |
| Published: |
2014
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| Online Access: | https://ir.uitm.edu.my/id/eprint/86983/1/86983.PDF https://ir.uitm.edu.my/id/eprint/86983/ |
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| Summary: | This thesis report on fabrication technique of electride pattern using e-beam lithography and wet etching procss on lead zirconate titanate thin film. The patterns were created using Raith software, |
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