The effect(s) of mask alignment to P-N junction / Ahd Syarifuddin Mohd Helmi
[1]This study simplify the mask alignment process in fabrication of a simple p-n junction. [2]Optimize the dimension of the device where the pattern is easy to be transfer on the wafer in fabricating a simple p-n junction. [3]To design a suitable mask that is easy to transfer the pattern on the...
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| Format: | Conference or Workshop Item |
| Language: | en |
| Published: |
2010
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| Subjects: | |
| Online Access: | https://ir.uitm.edu.my/id/eprint/67081/1/67081.pdf https://ir.uitm.edu.my/id/eprint/67081/ |
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