Investigation of doping techniques on the silicon based capacitor / Ahmad Sabirin Zoolfakar ...[et al.]

This technical paper investigates the effect of doping techniques, type of dopant species and the plate size on the capacitance density of a silicon based capacitor. The substrate of the silicon wafers are highly doped using either solid source (SS) or spin-on dopant (SOD) method. Experiments are ca...

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Bibliographic Details

Main Authors:	Zoolfakar, Ahmad Sabirin, Yaacob, Ahmad Akmalhakim, Zolkapli, Maizatul, Zakaria, Azlan, Abdul Wahab, Mohd Zahrin
Format:	Article
Language:	en
Published:	UiTM Press 2010
Subjects:	TK Electrical engineering. Electronics. Nuclear engineering
Online Access:	https://ir.uitm.edu.my/id/eprint/61883/1/61883.pdf https://ir.uitm.edu.my/id/eprint/61883/ https://jeesr.uitm.edu.my/v1/
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