The dependency of quality and physical properties of resist film on the spin coating process / Nur Mahfuzah Mohd Zamri
The research project is actually an approach on the spin coating process and how the quality and physical properties of resist film produced after coating depends on the parameters. The details obtained from this research project is vital in producing or obtaining a good performance of electrical de...
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| Format: | Student Project |
| Language: | en |
| Published: |
2013
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| Online Access: | https://ir.uitm.edu.my/id/eprint/47691/1/47691.pdf https://ir.uitm.edu.my/id/eprint/47691/ |
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