Fabrication and varification of porous silicon nanostructures/ zinc oxide nanostructures as a capacitive chemical sensors by electrochemical impedance method / Mohd Husairi Fadzilah Suhaimi
In this study, preparation and optimization of ZnO nanostructures on PSiNs for chemical sensor was studied. The PSiNs was prepared by electrochemical etching using p-type, [100] orientation silicon wafer as a based material. The PSiNs samples were prepared by the electrochemical etching with photo-a...
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| Format: | Thesis |
| Language: | en |
| Published: |
2015
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| Online Access: | https://ir.uitm.edu.my/id/eprint/40015/1/40015.pdf https://ir.uitm.edu.my/id/eprint/40015/ |
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