Development and fabrication of piezoresistive microcantilever-based glucose biosensor / Nina Korlina Madzhi
This thesis is focused on the Development and Fabrication of the Piezoresistive Microcantilever-based Glucose Biosensor. The objective of this work is to design via simulation a piezoresistive microcantilever sensor suitable for glucose sensing. Then, the piezoresistive microcantilever is fabricated...
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| Format: | Book Section |
| Language: | en |
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Institute of Graduate Studies, UiTM
2012
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| Online Access: | https://ir.uitm.edu.my/id/eprint/19111/1/ABS_NINA%20KORLINA%20MADZHI%20TDRA%20VOL%201%20IGS%2012.pdf https://ir.uitm.edu.my/id/eprint/19111/ |
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| _version_ | 1833060491262427136 |
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| author | Madzhi, Nina Korlina |
| author_facet | Madzhi, Nina Korlina |
| author_sort | Madzhi, Nina Korlina |
| building | Tun Abdul Razak Library |
| collection | Institutional Repository |
| content_provider | Universiti Teknologi Mara |
| content_source | UiTM Institutional Repository |
| continent | Asia |
| country | Malaysia |
| description | This thesis is focused on the Development and Fabrication of the Piezoresistive Microcantilever-based Glucose Biosensor. The objective of this work is to design via simulation a piezoresistive microcantilever sensor suitable for glucose sensing. Then, the piezoresistive microcantilever is fabricated with CMOS micromachining technique. The fabricated piezoresistive microcantilever performed the fabrication process characterization to prove the viability of the design. Finally, the objective in this work is to identify suitable Glucose immobilization technique onto microcantilever surface. The methodology of this work starts with the designing of piezoresistive microcantilever. The microcantilever beam length is selected at 195μm and width, 70μm. On this microcantilever beam there are four different piezoresistor with the length of 80μm, 110μm, 140μm and 170μm. The sacrificial layer of BPSG material in the piezoresistive microcantilever have two different thickness of 0.9μm and 1.8μm. |
| format | Book Section |
| id | my.uitm.ir-19111 |
| institution | Universiti Teknologi Mara |
| language | en |
| publishDate | 2012 |
| publisher | Institute of Graduate Studies, UiTM |
| record_format | eprints |
| spelling | my.uitm.ir-191112018-06-11T01:16:18Z https://ir.uitm.edu.my/id/eprint/19111/ Development and fabrication of piezoresistive microcantilever-based glucose biosensor / Nina Korlina Madzhi Madzhi, Nina Korlina Malaysia This thesis is focused on the Development and Fabrication of the Piezoresistive Microcantilever-based Glucose Biosensor. The objective of this work is to design via simulation a piezoresistive microcantilever sensor suitable for glucose sensing. Then, the piezoresistive microcantilever is fabricated with CMOS micromachining technique. The fabricated piezoresistive microcantilever performed the fabrication process characterization to prove the viability of the design. Finally, the objective in this work is to identify suitable Glucose immobilization technique onto microcantilever surface. The methodology of this work starts with the designing of piezoresistive microcantilever. The microcantilever beam length is selected at 195μm and width, 70μm. On this microcantilever beam there are four different piezoresistor with the length of 80μm, 110μm, 140μm and 170μm. The sacrificial layer of BPSG material in the piezoresistive microcantilever have two different thickness of 0.9μm and 1.8μm. Institute of Graduate Studies, UiTM 2012 Book Section PeerReviewed text en https://ir.uitm.edu.my/id/eprint/19111/1/ABS_NINA%20KORLINA%20MADZHI%20TDRA%20VOL%201%20IGS%2012.pdf Development and fabrication of piezoresistive microcantilever-based glucose biosensor / Nina Korlina Madzhi. (2012) In: The Doctoral Research Abstracts. IPSis Biannual Publication, 1 (1). Institute of Graduate Studies, UiTM, Shah Alam. |
| spellingShingle | Malaysia Madzhi, Nina Korlina Development and fabrication of piezoresistive microcantilever-based glucose biosensor / Nina Korlina Madzhi |
| title | Development and fabrication of piezoresistive microcantilever-based glucose biosensor / Nina Korlina Madzhi |
| title_full | Development and fabrication of piezoresistive microcantilever-based glucose biosensor / Nina Korlina Madzhi |
| title_fullStr | Development and fabrication of piezoresistive microcantilever-based glucose biosensor / Nina Korlina Madzhi |
| title_full_unstemmed | Development and fabrication of piezoresistive microcantilever-based glucose biosensor / Nina Korlina Madzhi |
| title_short | Development and fabrication of piezoresistive microcantilever-based glucose biosensor / Nina Korlina Madzhi |
| title_sort | development and fabrication of piezoresistive microcantilever-based glucose biosensor / nina korlina madzhi |
| topic | Malaysia |
| url | https://ir.uitm.edu.my/id/eprint/19111/1/ABS_NINA%20KORLINA%20MADZHI%20TDRA%20VOL%201%20IGS%2012.pdf https://ir.uitm.edu.my/id/eprint/19111/ |
| url_provider | http://ir.uitm.edu.my/ |