ANSYS simulation study of MEMS tuning fork gyroscope: article

This paper presents a MEMS based Tuning Fork Gyroscope (TFG) design by using ANSYS software. The designing of the Tuning Fork Gyroscope is based on the architecture and the parameter that been chosen from the previous studies. The structure of TFG is focus on the capacitance at the comb’s structure...

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Bibliographic Details

Main Author:	Abdul Rahman, Muhammad Syafwan
Format:	Article
Language:	en
Published:	2013
Subjects:	TK Electrical engineering. Electronics. Nuclear engineering Microelectromechanical systems
Online Access:	https://ir.uitm.edu.my/id/eprint/122195/1/122195.pdf https://ir.uitm.edu.my/id/eprint/122195/
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