Electrical properties of metal-insulator-semiconductor (MIS) using low temperature deposition of ZnO as semiconductor layer: article / Saifullah Ali Harun
This paper investigates the performance of low temperature zinc oxide (ZnO) film as semiconductor and poly(methyl methacrylate) (PMMA) as insulator layer in metalinsulator-semiconductor (MIS) structure. ZnO films were grown at different temperatures from 40oC, 60oC, 80oC, 100oC and 120oC. XRD result...
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| Format: | Article |
| Language: | en |
| Published: |
2013
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| Online Access: | https://ir.uitm.edu.my/id/eprint/115269/1/115269.pdf https://ir.uitm.edu.my/id/eprint/115269/ |
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