Finite element thermal analysis of a lateral microelectrothermal actuators / Mohd Shukhri Abd Rahman

Nowadays, MEMS is an enabling technology allowing the development of smart products, augmenting the computational ability of microelectronics with the perception and control capabilities of microsensors and microactuators and expanding the space of possible designs and applications. Microelectrother...

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Bibliographic Details

Main Author:	Abd Rahman, Mohd Shukhri
Format:	Thesis
Language:	en
Published:	2011
Subjects:	Finite element method TK Electrical engineering. Electronics. Nuclear engineering
Online Access:	https://ir.uitm.edu.my/id/eprint/114953/1/114953.pdf https://ir.uitm.edu.my/id/eprint/114953/
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