Finite element thermal analysis of a lateral microelectrothermal actuators / Mohd Shukhri Abd Rahman
Nowadays, MEMS is an enabling technology allowing the development of smart products, augmenting the computational ability of microelectronics with the perception and control capabilities of microsensors and microactuators and expanding the space of possible designs and applications. Microelectrother...
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| Format: | Thesis |
| Language: | en |
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2011
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| Online Access: | https://ir.uitm.edu.my/id/eprint/114953/1/114953.pdf https://ir.uitm.edu.my/id/eprint/114953/ |
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