Effect of nitrogen doping in amorphous carbon thin films grown by thermal Chemical Vapor Deposition (CVD) method / Maisarah Mohd Robat
This paper is to investigate the effect of Nitrogen doping on amorphous carbon thin films at different Nitrogen flow rates and different deposition temperature by thermal chemical vapor deposition (CVD) technique. Camphor oil was used as the precursor while argon and nitrogen were used as carrier ga...
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| Format: | Thesis |
| Language: | en |
| Published: |
2012
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| Online Access: | https://ir.uitm.edu.my/id/eprint/113967/1/113967.pdf https://ir.uitm.edu.my/id/eprint/113967/ |
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