Heat-assisted μ-electrical discharge machining of silicon

Micro-electrical discharge machining (μEDM) is an unconventional machining method that is suitable for machining of conductive materials including highly doped silicon (Si) wafers. This paper reports a novel method of heat-assisted μEDM machining of Si wafers by varying the temperature to increase...

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Bibliographic Details

Main Authors:	Daud, Noor Dzulaikha, Ghazali, Farah Afiqa Mohd, Hamid, Fatimah Khairiah Abd, Nafea, Marwan, Saleh, Tanveer, Leow, Pei Ling, Ali, Mohamed Sultan Mohamed
Format:	Article
Language:	en
Published:	Springer Nature 2021
Subjects:	T Technology (General)
Online Access:	http://irep.iium.edu.my/88380/1/88380_Heat-assisted%20%CE%BC-electrical.pdf http://irep.iium.edu.my/88380/ https://link.springer.com/article/10.1007/s00170-021-06734-y
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