Enhanced piezoelectric properties of aluminium doped zinc oxide thin film for surface acoustic wave resonators on a CMOS platform

The increase in frequency spectrum for wireless communication system has led to the growing interest in thin film electroacoustic technology that scales favorably upon miniaturization. Non-ferroelectric piezoelectric thin films such as Zinc Oxide is one of the most promising material for Complementa...

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Bibliographic Details

Main Authors:	Md Ralib, Aliza Aini, Mortada, Ossama, Orlianges, Jean Christophe, Crunteanu, Aurelian, Chatras, Matthieu, Nordin, Anis Nurashikin
Format:	Article
Language:	en en en
Published:	Springer New York LLC 2017
Subjects:	TA Engineering (General). Civil engineering (General) TJ Mechanical engineering and machinery
Online Access:	http://irep.iium.edu.my/57290/1/57290_Enhanced%20piezoelectric.pdf http://irep.iium.edu.my/57290/2/57290_Enhanced%20piezoelectric_WOS.pdf http://irep.iium.edu.my/57290/3/57290_Enhanced%20piezoelectric_SCOPUS_new.pdf http://irep.iium.edu.my/57290/ https://link.springer.com/article/10.1007/s10854-017-6647-6
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