Fabrication of monolithic wheatstone bridge circuit for piezoresistive microcantilever sensor

In this paper, the fabrication of monolithic Wheatstone bridge circuit on piezoresistive microcantilever sensor is presented. The development of the device is realized through silicon micromachining technology on silicon substrate through three major fabrication steps including silicon piezoresisti...

Full description

Bibliographic Details

Main Authors:	Ab Rahim, Rosminazuin, Nordin, Anis Nurashikin, Abdul Malik, Noreha, Bais, Badariah, Majlis, Yeop Burhanuddin
Format:	Proceeding Paper
Language:	en en
Published:	2015
Subjects:	T Technology (General)
Online Access:	http://irep.iium.edu.my/44490/1/44490.pdf http://irep.iium.edu.my/44490/4/44490_Fabrication%20of%20monolithic%20wheatstone%20bridge_Scopus.pdf http://irep.iium.edu.my/44490/ http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=7160998
Tags:	Add Tag No Tags, Be the first to tag this record!