Analysis of electrical responses of MEMS piezoresistive microcantilever

In this paper, an optimization of mechanical and electrical performance of single-layer silicon piezoresistive microcantilever (PRM) sensor in which both piezoresistor and microcantilever structures are made of the same material of single-crystalline silicon was discussed. Using CoventorWare 2008, t...

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Bibliographic Details

Main Authors:	Ab Rahim, Rosminazuin, Ookar Abubakkar, Sheik Fareed, Bais, Badariah, Yeop Majlis, Burhanuddin
Format:	Proceeding Paper
Language:	en en
Published:	2014
Subjects:	T Technology (General)
Online Access:	http://irep.iium.edu.my/39191/1/39191.pdf http://irep.iium.edu.my/39191/4/39191_Analysis%20of%20electrical%20responses%20of%20MEMS_Scopus.pdf http://irep.iium.edu.my/39191/ http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7031616
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