Enhancing sensitivity in flexible MEMS capacitive pressure sensors: a review

vancements focus on material innovations like graphene and silver nanowires, structural designs such as pyramidal microstructures and interdigitated electrodes, and fabrication techniques like laser-induced graphene and multilayer architectures. These approaches improve se...

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Bibliographic Details

Main Authors:	Hajizi, H. M. M., Aris, H., Ismail, M. H., Nor, N. I. M., Nordin, Anis Nurashikin, Jamel, N., Johari, S., Aziz, A. A.
Format:	Proceeding Paper
Language:	en en
Published:	IOP Publishing Ltd 2025
Subjects:	TK Electrical engineering. Electronics Nuclear engineering TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
Online Access:	http://irep.iium.edu.my/123253/2/123253_Enhancing%20sensitivity%20in%20flexible.pdf http://irep.iium.edu.my/123253/3/123253_Enhancing%20sensitivity%20in%20flexible_Scopus.pdf http://irep.iium.edu.my/123253/ https://doi.org/10.1088/1742-6596/3020/1/012010
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