Enhancing sensitivity in flexible MEMS capacitive pressure sensors: a review
vancements focus on material innovations like graphene and silver nanowires, structural designs such as pyramidal microstructures and interdigitated electrodes, and fabrication techniques like laser-induced graphene and multilayer architectures. These approaches improve se...
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| Main Authors: | , , , , , , , |
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| Format: | Proceeding Paper |
| Language: | en en |
| Published: |
IOP Publishing Ltd
2025
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/123253/2/123253_Enhancing%20sensitivity%20in%20flexible.pdf http://irep.iium.edu.my/123253/3/123253_Enhancing%20sensitivity%20in%20flexible_Scopus.pdf http://irep.iium.edu.my/123253/ https://doi.org/10.1088/1742-6596/3020/1/012010 |
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| Summary: | vancements focus on material innovations like graphene and silver
nanowires, structural designs such as pyramidal microstructures and
interdigitated electrodes, and fabrication techniques like laser-induced graphene
and multilayer architectures. These approaches improve sensitivity, broaden
detection ranges, and enhance response times. Despite progress, challenges in
stability and fabrication complexity remain. This review summarises current
strategies, offering insights into advancing sensor performance for emerging
applications. |
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