Enhancement of quality factor in ST-cut quartz surface acoustic wave devices by using different numbers of IDTs and wavelengths for gas sensing
A robust sensing mechanism requires a high sensitivity, fast response, and good fabrication compatibility. A surface acoustic wave (SAW) device possesses such properties, which make it suitable for gas sensing. This paper reported on the design, fabrication, characterization and measurement of a two...
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| Main Authors: | , , , , , , , |
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| Format: | Proceeding Paper |
| Language: | en |
| Published: |
IEEE
2023
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/105681/1/105681_Enhancement%20of%20quality%20factor.pdf http://irep.iium.edu.my/105681/ https://ieeexplore.ieee.org/document/10175929 |
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