Growth conditions of graphene grown in chemical vapour deposition (CVD)

The fabrication of high quality graphene has become the main interest in current chemical vapour deposition (CVD) method due to the scalability for mass production of graphene-based electronic devices. The quality of graphene is determined by defect density, number of layers and properties changed s...

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Main Authors: Mohamad Shukri Sirat, Edhuan Ismail, Hadi Purwanto, Mohd Asyadi Azam Mohd Abid, Mohd Hanafi Ani
Format: Article
Language:en
Published: Penerbit Universiti Kebangsaan Malaysia 2017
Online Access:http://journalarticle.ukm.my/11119/1/04%20Mohamad%20Shukri%20Sirat.pdf
http://journalarticle.ukm.my/11119/
http://www.ukm.my/jsm/malay_journals/jilid46bil7_2017/KandunganJilid46Bil7_2017.html
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author Mohamad Shukri Sirat,
Edhuan Ismail,
Hadi Purwanto,
Mohd Asyadi Azam Mohd Abid,
Mohd Hanafi Ani,
author_facet Mohamad Shukri Sirat,
Edhuan Ismail,
Hadi Purwanto,
Mohd Asyadi Azam Mohd Abid,
Mohd Hanafi Ani,
author_sort Mohamad Shukri Sirat,
building Tun Sri Lanang Library
collection Institutional Repository
content_provider Universiti Kebangsaan Malaysia
content_source UKM Journal Article Repository
continent Asia
country Malaysia
description The fabrication of high quality graphene has become the main interest in current chemical vapour deposition (CVD) method due to the scalability for mass production of graphene-based electronic devices. The quality of graphene is determined by defect density, number of layers and properties changed such as electron mobility, transparency and conductivity as compared to the pristine graphene. Here, we did a study on the effects of reaction conditions such as methane, CH4 concentration and deposition time towards the quality of graphene produced. We found that by lowering both CH4 concentration down to 20% and deposition time to 5 min, a better quality graphene was produced with higher I2D/IG ratio of 0.82 compared to other reaction condition. Through the analysis, we concluded that there are two important parameters to be controlled to obtain high quality graphene.
format Article
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institution Universiti Kebangsaan Malaysia
language en
publishDate 2017
publisher Penerbit Universiti Kebangsaan Malaysia
record_format eprints
spelling my-ukm.journal-111192017-12-21T04:12:01Z http://journalarticle.ukm.my/11119/ Growth conditions of graphene grown in chemical vapour deposition (CVD) Mohamad Shukri Sirat, Edhuan Ismail, Hadi Purwanto, Mohd Asyadi Azam Mohd Abid, Mohd Hanafi Ani, The fabrication of high quality graphene has become the main interest in current chemical vapour deposition (CVD) method due to the scalability for mass production of graphene-based electronic devices. The quality of graphene is determined by defect density, number of layers and properties changed such as electron mobility, transparency and conductivity as compared to the pristine graphene. Here, we did a study on the effects of reaction conditions such as methane, CH4 concentration and deposition time towards the quality of graphene produced. We found that by lowering both CH4 concentration down to 20% and deposition time to 5 min, a better quality graphene was produced with higher I2D/IG ratio of 0.82 compared to other reaction condition. Through the analysis, we concluded that there are two important parameters to be controlled to obtain high quality graphene. Penerbit Universiti Kebangsaan Malaysia 2017-07 Article PeerReviewed application/pdf en http://journalarticle.ukm.my/11119/1/04%20Mohamad%20Shukri%20Sirat.pdf Mohamad Shukri Sirat, and Edhuan Ismail, and Hadi Purwanto, and Mohd Asyadi Azam Mohd Abid, and Mohd Hanafi Ani, (2017) Growth conditions of graphene grown in chemical vapour deposition (CVD). Sains Malaysiana, 46 (7). pp. 1033-1038. ISSN 0126-6039 http://www.ukm.my/jsm/malay_journals/jilid46bil7_2017/KandunganJilid46Bil7_2017.html
spellingShingle Mohamad Shukri Sirat,
Edhuan Ismail,
Hadi Purwanto,
Mohd Asyadi Azam Mohd Abid,
Mohd Hanafi Ani,
Growth conditions of graphene grown in chemical vapour deposition (CVD)
title Growth conditions of graphene grown in chemical vapour deposition (CVD)
title_full Growth conditions of graphene grown in chemical vapour deposition (CVD)
title_fullStr Growth conditions of graphene grown in chemical vapour deposition (CVD)
title_full_unstemmed Growth conditions of graphene grown in chemical vapour deposition (CVD)
title_short Growth conditions of graphene grown in chemical vapour deposition (CVD)
title_sort growth conditions of graphene grown in chemical vapour deposition (cvd)
url http://journalarticle.ukm.my/11119/1/04%20Mohamad%20Shukri%20Sirat.pdf
http://journalarticle.ukm.my/11119/
http://www.ukm.my/jsm/malay_journals/jilid46bil7_2017/KandunganJilid46Bil7_2017.html
url_provider http://journalarticle.ukm.my/