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    Piezoelectric characteristics of CMOS compatible AIN SAW resonators

    Piezoelectric characteristics of CMOS compatible AIN SAW resonators by Md Ralib @ Md Raghib, Aliza 'Aini, Pandian, Mohanraj Saundara, Ferrer, Eloi Mariago, Song, Charlie TayWee, Shunmugam, Muniandy, Zainuddin, Ahmad Anwar, Nordin, Anis Nurashikin

    Published 2014
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