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    Experimental investigations of the effect of the neutral gas pressure on the separate control of ion energy and flux in dual frequency capacitively coupled plasmas

    Experimental investigations of the effect of the neutral gas pressure on the separate control of ion energy and flux in dual frequency capacitively coupled plasmas by Saikia, Partha, Bhuyan, Heman, Yap, Seong Ling, Escalona, Miguel, Favre, Mario, Wyndham, Edmund, Schulze, Julian

    Published 2019
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