Search Results - Mohd Jeffery, Manaf

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    Characterization of alignment strategy to achieve a reliable alignment accuracy in advanced lithography

    Characterization of alignment strategy to achieve a reliable alignment accuracy in advanced lithography by Normah Ahmad, Uda Hashim, Mohd Jeffery Manaf, Kadir Ibrahim Abdul Wahab

    Published 2007
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    Effect of alignment mark architecture on alignment signal behavior in advanced lithography

    Effect of alignment mark architecture on alignment signal behavior in advanced lithography by Normah, Ahmad, Uda, Hashim, Mohd Jeffery, Manaf, Kader Ibrahim, Abdul Wahab

    Published 2009
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