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    Out-of-plane Characterization of Silicon-on-insulator Multiuser MEMS Processes-based Tri-axis Accelerometer

    Out-of-plane Characterization of Silicon-on-insulator Multiuser MEMS Processes-based Tri-axis Accelerometer by L., Sujatha, S., Kalaiselvi, Vigneswaran, Narayanamurthy

    Published 2016
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