Search Results - Henderson, Robert

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    Integration of IC technology with MEMS: Silicon+ technology for the future

    Integration of IC technology with MEMS: Silicon+ technology for the future by Walton, AJ, Stevenson, JTM, Underwood, Ian, Terry, JG, Smith, S, Parkes, William, Dunare, Camelia, Lin, H, Li, Yifan, Henderson, Robert, others

    Published 2007
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    Silicon-post processing CMOS wafers to create integrated sensors, MEMS and electro-optic systems

    Silicon-post processing CMOS wafers to create integrated sensors, MEMS and electro-optic systems by Walton, AJ, Stevenson, JTM, Underwood, Ian, Terry, JG, Smith, S, Parkes, William, Dunare, Camelia, Lin, H, Li, Yifan, Henderson, Robert, others

    Published 2010
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