Cover Image

Optimization of Rapid Thermal Processing in 0.13 micron CMOS Poly Silicon Gate

Saved in:
Bibliographic Details
Main Author: Chew, Soon Aik
Format: Thesis
Language:English
Published: 2003
Subjects:
TK Electrical engineering. Electronics Nuclear engineering
Online Access:http://utpedia.utp.edu.my/id/eprint/6825/1/2003%20-%20Optimization%20of%20Rapid%20Thermal%20Processing%20in%200.13%20Micron%20CMOS%20Poly%20Silicon%20Gate.pdf
http://utpedia.utp.edu.my/id/eprint/6825/
Tags: Add Tag
No Tags, Be the first to tag this record!
id oai:utpedia.utp.edu.my:6825
record_format eprints
spelling oai:utpedia.utp.edu.my:68252025-02-04T02:55:04Z http://utpedia.utp.edu.my/id/eprint/6825/ Optimization of Rapid Thermal Processing in 0.13 micron CMOS Poly Silicon Gate Chew, Soon Aik TK Electrical engineering. Electronics Nuclear engineering 2003-11 Thesis NonPeerReviewed application/pdf en http://utpedia.utp.edu.my/id/eprint/6825/1/2003%20-%20Optimization%20of%20Rapid%20Thermal%20Processing%20in%200.13%20Micron%20CMOS%20Poly%20Silicon%20Gate.pdf Chew, Soon Aik (2003) Optimization of Rapid Thermal Processing in 0.13 micron CMOS Poly Silicon Gate. Masters thesis, Universiti Teknologi Petronas.
institution Universiti Teknologi Petronas
building UTP Resource Centre
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknologi Petronas
content_source UTP Electronic and Digitized Intellectual Asset
url_provider http://utpedia.utp.edu.my/
language English
topic TK Electrical engineering. Electronics Nuclear engineering
spellingShingle TK Electrical engineering. Electronics Nuclear engineering
Chew, Soon Aik
Optimization of Rapid Thermal Processing in 0.13 micron CMOS Poly Silicon Gate
format Thesis
author Chew, Soon Aik
author_facet Chew, Soon Aik
author_sort Chew, Soon Aik
title Optimization of Rapid Thermal Processing in 0.13 micron CMOS Poly Silicon Gate
title_short Optimization of Rapid Thermal Processing in 0.13 micron CMOS Poly Silicon Gate
title_full Optimization of Rapid Thermal Processing in 0.13 micron CMOS Poly Silicon Gate
title_fullStr Optimization of Rapid Thermal Processing in 0.13 micron CMOS Poly Silicon Gate
title_full_unstemmed Optimization of Rapid Thermal Processing in 0.13 micron CMOS Poly Silicon Gate
title_sort optimization of rapid thermal processing in 0.13 micron cmos poly silicon gate
publishDate 2003
url http://utpedia.utp.edu.my/id/eprint/6825/1/2003%20-%20Optimization%20of%20Rapid%20Thermal%20Processing%20in%200.13%20Micron%20CMOS%20Poly%20Silicon%20Gate.pdf
http://utpedia.utp.edu.my/id/eprint/6825/
_version_ 1823277516612173824
score 13.239859

Similar Items