Die-level defects classification using region-based convolutional neural network
Visual inspection process on semiconductors is usually performed by human experts. These inspection tasks require extreme concentration, and the time an inspector could continue the inspection tasks is limited. An automated die-level defects classification system is presented in this paper to replac...
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| 主要な著者: | , , |
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| フォーマット: | Conference or Workshop Item |
| 出版事項: |
2022
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| 主題: | |
| オンライン･アクセス: | http://eprints.utm.my/id/eprint/98693/ http://dx.doi.org/10.1109/ICSE56004.2022.9863135 |
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