Nanowire formation for single electron transistor using SEM based Electron Beam Lithography (EBL) technique: Positive tone vs negative tone e-beam resist
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格式: | Article |
語言: | English |
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Nano Science and Technology Institute
2009
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在線閱讀: | http://dspace.unimap.edu.my/xmlui/handle/123456789/6977 |
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