Energy distributions of copper ions and atoms sputtered by atomic and molecular ions
Non-resonant multiphoton ionization combined with quadrupole and time-of-flight analysis has been used to study sputtering by both atomic and molecular ion beams. The mass spectra and energy distributions of both sputtered atoms and secondary ions produced by 3.6 keV Ar+, N+, N-2(+), CF2+ and CF3+ i...
保存先:
| 主要な著者: | , , |
|---|---|
| フォーマット: | 論文 |
| 出版事項: |
Institute of Physics
1997
|
| 主題: | |
| オンライン･アクセス: | http://eprints.um.edu.my/7865/ |
| タグ: |
タグ追加
タグなし, このレコードへの初めてのタグを付けませんか!
|